Used LAM RESEARCH TCP 9400 #9243878 for sale

LAM RESEARCH TCP 9400 is an efficient, full-featured etcher / asher that provides optimal process flexibility. It is a member of the award-winning TCP series of process tools and is designed to deliver superior performance in both R&D and production applications. TCP 9400 offers precise and repeatable processes of all metals and dielectrics, including polymers, metals, organics, and ceramics. LAM RESEARCH TCP 9400 is well-suited for the etching and stripping of wafers with thicknesses ranging from 1.4mm to 4.5mm. TCP 9400 etcher / asher offers maximum process flexibility and includes a variety of process gases, substrates, and chuck temperatures. It has a variety of different process modules that allow for easy customization of the etcher for different processes. For plasma-based processes, LAM RESEARCH TCP 9400 provides excellent uniformity with the use of the patented PlasmaTuner™ module. The PlasmaTuner module precisely adjusts the output power of the plasma source for superior uniformity and process control. TCP 9400 also includes the latest software and hardware for automation of processes. It features integrated process control with integrated peripheral devices, and a complete suite of software and hardware for customers to quickly and easily program their processes. LAM RESEARCH TCP 9400 is designed for ultimate repeatability and reproducibility to yield consistent, reliable results. It provides dual independent filters for superior air heat exchange, which minimizes thermal gradients throughout the chamber and provides uniformity that is 20 times better than competitive systems. TCP 9400 also incorporates a water ring pump to deliver clean process gases efficiently and consistently. Overall, LAM RESEARCH TCP 9400 etcher / asher provides superior process flexibility and control for efficient etching and stripping of a wide variety of substrates. It is ideal for R&D and production applications requiring precision, repeatability, and reliability.