Used LAM RESEARCH TCP 9400 #9313523 for sale

LAM RESEARCH TCP 9400 is a high-precision, high-throughput etcher and asher for photomask production and other lithography applications. This benchtop etcher/asher offers superior process uniformity and repeatability, and can provide superior etching performance due to its precision design. TCP 9400 is designed with both wet and dry etching, as well as reactive ion etching (RIE) chamber options to accommodate the etching needs of different lithography processes. For instance, the wet etching chamber can be used for deep etching of silicon wafers, while the dry chamber is used for etching thin trenches with high aspect ratios. In addition, the RIE option can be used for etching more precise features, such as circuit lines and contacts. LAM RESEARCH TCP 9400 also features an end-point detector, which monitors the etching process and can be adjusted for different etch rates. This allows for better process control and optimization of etching results. The maximum etch rate of this etcher/asher is also adjustable, depending on the etch process and materials. TCP 9400 also features an advanced real-time substrate temperature control equipment. For example, it can maintain a temperature range between 4 to 400 degrees Celsius. The temperature control reduces errors due to thermal expansion and contraction, resulting in higher accuracy in etching operations. It also features a self-calibrating system to ensure consistent etch depths across different substrates. LAM RESEARCH TCP 9400 also has a control console equipped with a display and adjustable parameters, for settings such as exposure time, substrate temperature, and etching rate. This allows users to customize their etching operations with ease. It also features an on-screen recipe creator, which enables the user to select appropriate etching recipes for specific photomask production applications. TCP 9400 is a safe and reliable choice for etching and ashing related processes. The etcher/asher is designed with safety features, such as an emergency stop and an electronically-controlled interlock unit, to avoid hazardous conditions. It is also equipped with an air filtration machine to ensure cleanliness in the etching environment. In addition, it is designed with a load lock and a cleaning tool to ensure quick batch-to-batch transfers. Overall, LAM RESEARCH TCP 9400 is a reliable, high-precision etcher and asher designed for optimizing the etching and photomask operations. Its superior etching performance, high-precision temperature control asset, and safety features make it an efficient and reliable choice for etching and ashing applications.