Used LAM RESEARCH TCP 9400B #9402507 for sale

LAM RESEARCH TCP 9400B is a high-precision etcher and asher specifically designed for semiconductor device fabrication with tight process control requirements. With its patented gas cabinet, TCP 9400B is capable of producing faster, more uniform results with higher throughputs than other models. It provides industry-leading performance and reliability, making it ideal for mission-critical applications such as MEMS, RF, Advanced FTIQ and ultra-thin wafer processing. LAM RESEARCH TCP 9400B's gas cabinet technology removes gas molecules as they are drawn in through the chamber wall, leading to much better uniformity and speed of etching. This improved process control means smaller undercuts, better profile conformities, and fewer voids. A patented triangular phase-shift magnetron source delivers better than 95% uniformity for the etching of thick films. The advanced PID control system features automatic frequency tuning and a true-to-life model to continuously monitor the etch conditions. The machine has a single chuck and two process chambers, allowing users to etch and asher in the same job without leaving the system. It supports substrate sizes from 2 to 6 inches and rotation speeds up to 11,000 rpm. The process temperature range is between -10°C and +400°C, ensuring compatibility with almost any type of etching and ashing process. Other features include a 24-bit internal color LCD display, Ethernet connectivity with Network Addressable Remote Control (NARC 2) protocol, a patented low-consumption power supply design, and a host of safety systems, including an integrated burst-pressure notification system and electrostatic discharge (ESD) protection. TCP 9400B offers outstanding reliability, accuracy and repeatability. Its advanced process control technology and innovative design make it an ideal choice for precision etching and ashing applications.