Used LAM RESEARCH TCP 9408 SE #9014916 for sale

LAM RESEARCH TCP 9408SE Asher is a highly accurate, medium-duty, vapor phase wet etching tool well-suited for handling the requirements of mass production and process development. The Asher provides the precision, throughput, and repeatability required for today's ultimate photomask processes. It has been designed to handle a wide range of specialized process complexities and upscale production with minimum user effort, and minimal process cycle times. It offers a number of advantages over other etching systems, including automatic fine control of process parameters, such as flow rate, temperature, pressure, and cycle time. It uses a vaporous, adiabatic etching process, which provides a consistent and optimal etch process. This eliminate the drill of manual process condition optimization. The ultra-precise digital flow control ensures the maximum allowable etch rates without homogenizing critical dimensions. The temperature and pressure stability provides a wide process window for etch rate and substrate temperature. It has an intuitive Windows®-based touchscreen user interface with process log that provides real-time monitoring of etching process conditions, without the need of manual process monitoring. The Asher's reliable, proven DV12 process technology provides premium performance and true process versatility and is backed by a three-year limited warranty. It has a flexible, compact design which is easy to install and requires minimal space compared to traditional wet etching systems. The Asher is available with powered wafer heaters, and temperature, pressure, and flow controls routed directly to the front panel. It provides an integrated, automated source-gas delivery system for a wide range of etch chemistries, with automatic purging of the chamber between cycles and automatic control of pressure and temperature during etching. The TCP-CN-9408SE Asher is also equipped with a power-on safety switch and an emergency-off switch. The Asher also provides the capability to store process recipes with user manuals, enabling a rapid switch of process chemistries or process parameters. This ensures full process traceability and repeatability, making it suitable for the manufacture of high-volume, complex photomask production. The TCP-CN-9408SE Asher is the ideal solution for maximizing customer throughput while minimizing cost of ownership.