Used LAM RESEARCH TCP 9600 CFE #293809929 for sale

LAM RESEARCH TCP 9600 CFE is a high performance, fully automated etching/ashing equipment designed for the production of complex surface patterns in semiconductor device manufacturing. This highly efficient system provides enhanced control of processing parameters for uniform etching/ashing results across a wide range of applications. The machine's primary components include a vacuum process chamber, wafer transport robot, process and exhaust pumps, a panel controller, and a computerized data acquisition unit. The controller provides the user with full command access to all operations. LAM RESEARCH TCP 9600CFE can be fitted with a range of optional features, such as 1X and 1X/2X zoom magnification capabilities for enhanced pattern resolution. The vacuum machine utilizes a V139 two-stage scroll pump located in the process chamber, along with an additional scroll pump in the exhaust chamber. These pumps provide the user with precise control of chamber pressure, as well as fluctuation monitoring. The wafer transport robot is a fully integrated, precision engineered arm assembly, capable of servicing both single wafer and stripe-transferred substrates in parallel. Equipped with safety interlocks and proximity sensors, the robot provides secure, and accurate wafer handling. The main chamber is operated by a panel controller and signal distribution tool, which integrates with the user's personal work station. Step-by-step programming and monitoring is provided in the step editor, which offers various types of annunciated outputs, enabling users to modify the chamber parameters on a step-by-step basis. This ensures maximum precision and uniformity in process uniformity. Applications for this etching/ashing asset include etchback processes for diffusion and shallow trench isolation (STI), including dielectric materials such as silicon oxide, nitrides, polyimide, boron phosphorous silicate glasses, and alumina, as well as metal etches such as copper, tungsten and gold. This etcher/asher provides exceptional control and accuracy in complex etching and ashing requirements. TCP 9600 CFE etcher/asher is a highly capable machine that is designed to provide excellent surface patterning quality and fast throughput. With its multi-zone capability, advanced robotics and precision instrumentation, TCP 9600CFE is an excellent choice for your etching and ashing requirements.