Used LAM RESEARCH TCP 9600 CFE #293809931 for sale

LAM RESEARCH TCP 9600 CFE is an etcher / asher used for processing wafers in the semiconductor fabrication process. It is part of the TCP family of etchers and ashers, which are designed to achieve high quality wafer processing without compromising on throughput. LAM RESEARCH TCP 9600CFE offers a high-speed chamber and has automatic wafers tracking, as well as a sophisticated chamber-conductance feature that allows precise tuning of etch and ashing recipes. This enables excellent control and uniformity in the thin-film structures created on the wafers. TCP 9600 CFE chamber has a wide range of adjustable parameters that enable a wide range of materials to be processed, from polysilicon to low-k dielectrics. The chamber also features a large, homogeneous plasma chamber that enables a high etch rate. The chamber contains two separate etchers and ashers, enabling simultaneous processing of two different materials. The chamber also features advanced automation and precision temperature control, allowing for precise and consistent etching results. TCP 9600CFE etcher / asher is designed to be used in combination with the state-of-the-art Lam Washer System, which provides superior cleaning and drying of the wafer after processing. The Lam Washer System has built-in memory, diagnostics, and troubleshooting capabilities that make it an excellent solution for consistent and reliable processing of high-density thin-film layers. LAM RESEARCH TCP 9600 CFE is an excellent tool for achieving high throughput and repeatable operation with excellent uniformity in thin-film structures created on wafers. Its advanced automation, precision temperature control, and wide range of processable materials make it an ideal solution for applications such as semiconductor device fabrication, where high-density layers must be etched or ashed. Its user-friendly interface and reliable performance make it an excellent choice for those requiring high-quality etching and ashing results.