Used LAM RESEARCH TCP 9600 CFE #9296670 for sale

LAM RESEARCH TCP 9600 CFE is an advanced etcher/asher developed by LAM RESEARCH Corporation. This equipment incorporates the latest in etching and ashing technology. It has an ultra-high productivity design and provides an easy to use platform that facilitates fast and reliable etching and ashing processes. LAM RESEARCH TCP 9600CFE is lightweight, yet highly durable with a closed-loop, low-pressure operation that helps ensure consistent etching and ashing processes. It has a highly uniform deposition across a wide range of substrates and features solid-state optical digital emission control through a network of three color video cameras. This digital emission control system helps to ensure consistent and reliable results. TCP 9600 CFE is equipped with three high efficiency electro-optic heads that utilize advanced plasma torch technology and feature an ion beam extraction unit for the highest quality etching and ashing processes. This allows for minimal substrate degradation and the achievement of fine line etching and high aspect ratio ashing. TCP 9600CFE is a scalable, modular platform that can be upgraded to accommodate single-wafer or batch-processing and provides efficient wafer-to-wafer synchronization. It also offers multi positional substrate positioning and can easily integrate with other support systems such as gas delivery and exhaust. Overall, LAM RESEARCH TCP 9600 CFE is an advanced etcher/asher designed and manufactured by LAM RESEARCH Corporation. It is a lightweight and highly durable machine with a uniform deposition across a wide range of substrates and three high-efficiency electro-optic heads. It is also a scalable and modular platform that can be upgraded to accommodate single-wafer or batch-processing and easily integrates with other support systems such as gas delivery and exhaust.