Used LAM RESEARCH TCP 9600 SE #131567 for sale
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LAM RESEARCH TCP 9600 SE is a multi-chamber etcher/asher equipment used for semiconductor devices, MEMS, and other components. The system features a three-chamber design that enables precise etching and ashing of critical components. The temperature in each chamber can be controlled to ensure uniform temperature, and the process parameters are adjustable for the various substrates used. The integrated precision handling unit ensures repeatable results, and the cleanliness of the machine is ensured by its high-efficiency particulate air (HEPA) filters. LAM RESEARCH TCP 9600SE is a reliable, safe, and efficient tool that provides a consistent flow of gas throughout the etching and ashing process. It also includes a quartz showerhead with adjustable flow rate, which is capable of providing a uniform etching/ashing pattern, and there is an automated calibration asset that can be used to quickly and easily set up the size, pattern and process parameters. The chamber of TCP 9600 SE is constructed of stainless steel, and is configured with an enthalpy blower that provides a low-pressure, high-velocity gas shower. The gas shower is used to evenly distribute etching and ashing products, as well as protect components from contamination. The model also includes a dry-ring and wet-ring vacuum equipment that ensures consistent chamber pressures and temperatures throughout the etching and ashing process. TCP 9600SE is designed for use with various substrate configurations. It is compatible with aluminum, silicon, and glass substrates, as well as other materials such as stainless steel, platinum, tungsten and hard gold. Other substrates such as high-density polyethylene, polyimide, and Kapton can also be used with the system. The unit is designed for easy maintenance and repair, and includes a software package that allows operators to monitor the machine performance to ensure maximum uptime. LAM RESEARCH TCP 9600 SE also features a remote monitoring capability, allowing technicians to access data and make adjustments as needed, as well as access a library of recipes that allow standard processes to be quickly selected and implemented. In conclusion, LAM RESEARCH TCP 9600SE is an efficient and accurate machine that is perfect for etching and ashing components into the desired shapes and sizes. With its advanced temperature controls, precision handling systems, uniform gas distribution, and customizable software, it is an ideal tool for semiconductor device fabrications.
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