Used LAM RESEARCH TCP 9600 SE #293595662 for sale

LAM RESEARCH TCP 9600 SE
ID: 293595662
Wafer Size: 8"
Etcher, 8".
LAM RESEARCH TCP 9600 SE etcher/asher is a highly reliable and user-friendly system that is ideal for etching and ashing a wide variety of substrates including silicon, metals, and ceramics. It is capable of producing high-quality and feature-rich parts that are compatible with both integrated circuit and advanced packaging applications. The advanced features of LAM RESEARCH TCP 9600SE easily combine with its dependable and powerful performance to produce excellent results. TCP 9600 SE is equipped with a dual-function chamber that provides both etching and ashing capabilities, making it the perfect choice for quick jumps between functions. It also features two-stage stirring, which allows for rapid and steady ashing, even on complex etched substrates. TCP 9600SE offers an advanced-level process control, with up to eight programmable recipe steps and a variety of plasma actuation modes for increased process flexibility. The automated monitoring system helps to ensure accurate recipe manufacture and with its embedded safety features, LAM RESEARCH TCP 9600 SE is suitable for cleanroom operations. It also provides passivating capability, allowing for the preparation of surfaces with low-eV oxide stoichiometry and low particle levels. LAM RESEARCH TCP 9600SE is just as capable at etching deep trenches, and its advanced fluorine-enabled processes can precisely remove dielectrics and eliminates dust particles effectively. TCP 9600 SE is equipped with a convenient touchscreen and meets the needs of modern-day etching process needs by being capable of handling substrates up to 12 inches in size. The system also offers extremely accurate temperature and pressure control, allowing the user to create an optimal process for a variety of substrates achieving lower levels of damage. Its automated process recipes only need to be specified once, eliminating tedious setup and alignment steps. TCP 9600SE manages all process steps and result data from one central software platform, providing full traceability of process recipes, diagnostics, service, and technical support. As such, it is the ideal choice for efficient production of high-volume, high-quality parts for use in advanced semiconductor and packaging applications.
There are no reviews yet