Used LAM RESEARCH TCP 9600 SE #293757625 for sale
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ID: 293757625
Etcher, 8"
APM
Bias
Operator interface: Bulk head
Indexer: Hine 38A
715-331131-002 Fixed gao middle chamber
716-330122-003 Plate top ceramic
853-032190-008 TCP Matcher
853-330951-021 Bias matcher
Wafer clamping : ESC (Notch)
RF Generator
Chamber manometer: 3Torr
ALCATEL ATH-1300M Turbo pump
Pressure controller
Main: Vat valve, 64 PM and PM5
MDVX-018 & AC-2 DSQ
DSQ Hinged
DSQ Matcher
Heated paddle
WVDS Manual fill
Chamber heater controller: 12 Loop external anafaze
Orbitally welded gas box: (8) Gases
Closed loop He Cooling: UPC8130 and Tylan CDL-12S13 (20 Torr)
Remote power module: Main 175A Remote
Power module
C/B Hardware
Load station:
Belt type shuttle
Standard edge
Detector
Load lifter.
LAM RESEARCH TCP 9600 SE is an etcher or asher designed for high speed processes and is a type of wet bench technology. This etcher can perform processes such as plasma etching and ashing in a single chamber, with the etched and ashed materials delivered separately on the same platform. The 9600 SE offers a standard etch rate of 5 micron/min and an ashing rate of up to 100 microns/min. The plasma etcher uses a low-frequency induction assisted process and a consistent flow rate to ensure the uniformity of the materials being etched or ashed. The unit has an advanced, built-in controller responsible for controlling the plasma generation process. The controller is connected to the unit with a series of sensors that feed back temperature, pressure, and other conditions in order to ensure a consistent etching or ashing process. The controller also can provide automated operation of the plasma process and monitor the parameters used during the etching or ashing process. LAM RESEARCH TCP 9600SE is designed to be easy to use and maintain when compared to other wet bench-based etching or ashing systems. The unit is ergonomically designed with an easily adjustable height that can accommodate a variety of user needs. The 9600 SE also features an intuitive user interface for inputting etch and ashing parameters, allowing for quick adjustment of settings or operation. The etcher or asher is constructed with a stainless steel chamber, allowing for consistent and reliable cleaning. The chamber is heated with variable power to maintain a consistent etching or ashing temperature. An extension bell allows for the addition of extra etching or ashing balls where extra material is needed. TCP 9600 SE is equipped with a multi-function fume hood, to capture hazardous fumes resulting from etching or ashing processes. The hood is designed to be easily adjustable, offering a variety of airflow configurations to fit a variety of hazardous material collection needs. Overall, TCP 9600SE is an effective wet bench-based etcher or asher designed for efficient and cost-effective operation. The unit is a reliable choice for those requiring high-speed processes and wanting to use an easy-to-use and maintain etcher or asher.
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