Used LAM RESEARCH TCP 9600 SE #293820921 for sale

LAM RESEARCH TCP 9600 SE is an advanced etcher/asher used to enable critical surface and device processing. This advanced etching and ashing equipment is designed to enable precision wafer patterning with minimal bio-contamination risk and the highest level of overall throughput and process control. LAM RESEARCH TCP 9600SE is suitable for a variety of applications including RTP, etching, deoxidation, diffusion processes and plasma ashing. TCP 9600 SE consists of a single housing with four independently-controlled chambers. Each chamber contains a plasma source, shielding hardware, a private wafer lifts, and an atmospheric purging control panel. The system also features a temperature-controlled hatch to create a dust-contained environment. It is capable of processing up to ten wafers at a time and the wafers can be sized up to 200mm in diameter. The unit is equipped with several advanced etching and ashing processes that can be individually tailored to meet the needs of the individual application. This includes advanced plasma control technology, avoiding any direct deposition on sensitive chip areas and maintaining a uniform deposition rate. laser-assisted etching and ashing as well as advanced cooling systems. These technologies allow the machine to deliver outstanding precision etch and ash results while also controlling temperature, creating an anchorless annealing environment. The tool also features advanced algorithms that enable wafer protection from contamination issues, the optimization of etch and ash recipes, and monitoring of endpoints and quality of the process results. The recipe development is optimized for maximum process reproducibility and quality. Overall, TCP 9600SE is a powerful etch and ash asset that can deliver outstanding results in a variety of applications. Its advanced features, such as plasma control, laser-assisted etching, and advanced cooling systems, enable the model to deliver precision and quality etching and ashing results. The equipment has been designed to be easy to use and maintain and to deliver the best overall processing results.