Used LAM RESEARCH TCP 9600 SE #9095942 for sale

LAM RESEARCH TCP 9600 SE is a high performance reactively ion etched (RIE) and asher equipment designed to deliver tight dimensional control and process uniformity. This system features a high volume, integrated process chamber and an automated loadlock that make it a cost-effective solution for volume production. LAM RESEARCH TCP 9600SE also features advanced process control, multiple process recipes, and automated subsystems that make it a reliable partner for high volume manufacturing applications. TCP 9600 SE features an advanced process chamber, which is designed to provide high etch rates and superior process uniformity, while also offering a wide range of available etch and ashing chemistries. The spacious chamber also enables higher process throughput and lower costs. This unit also features a fully integrated loadlock machine that is designed to enable rapid sample loading. TCP 9600SE also includes a high-speed, automated wafer carrier and handling tool that ensures superior wafer protection throughout the etching and ashing process. LAM RESEARCH TCP 9600 SE is equipped with an advanced process control asset that enables precise recipe control for optimal process uniformity and repeatability. This model offers multiple process recipes, which enables the user to customize the etching and ashing process for their specific application. LAM RESEARCH TCP 9600SE's process control equipment also takes wafer flatness into consideration, in order to maximize etch uniformity. TCP 9600 SE features a variety of in-situ monitoring and metrology, including optical alignment and spectroscopic emission measurements. This system also features a touch screen and graphical user interface that allows the user to monitor and adjust the process parameters. TCP 9600SE is designed to be compatible with the majority of available etch and ashing chemistries and comes with a full range of accessories, including a loadlock and wafer-handling components for rapid and repeatable sample loading. Overall, LAM RESEARCH TCP 9600 SE is an advanced etching and ashing unit that offers high process throughput, tight dimensional control, and superior process control and uniformity. Its fully automated loadlock machine, multiple process recipes, and in-situ metrology features make it a reliable partner for high volume industrial applications.