Used LAM RESEARCH TCP 9600 SE #9095946 for sale

LAM RESEARCH TCP 9600 SE is an advanced etcher / asher process chamber designed to support the specialty etching, cleaning and passivation processes used in semiconductor device manufacturing. LAM RESEARCH TCP 9600SE provides precise, reliable wafer-level process control and is equipped with the latest in semiconductor process chamber technology, including advanced process control algorithms, an integrated RF generator and advanced software. TCP 9600 SE is designed specifically for etching, cleaning and passivation of semiconductor device surfaces. The chamber is equipped with temperature and pressure control, an oxygen monitor, in-situ chamber clean, an automated fluid filtration, and advanced RF generator technology for precise plasma etching and activation. The process chamber also offers advanced material contamination management using advanced digital tools such as fault isolation techniques, traceability and digital mixer / actuator control. TCP 9600SE equipment offers advanced process control and can be configured to support a variety of specialty processes, including film deposition, via etch, low k etch, low temperature wet etch, dark space sump etch, heap-type diffusion and cycle-time optimized via etch. The system also features an integrated RF generator that allows precise tuning of the power level and plasma parameters to ensure product quality. LAM RESEARCH TCP 9600 SE is capable of processing up to 300mm wafers, and is equipped with two quartz process chambers, an RF generator, an automated fluid filtering unit and a process-viewing machine. The tool offers full safety provisions, including an emergency stop and an E-Stop button to terminate processes and prevent machine damage. The process chamber is also equipped with an advanced software package which allows a user to monitor asset performance and optimize process recipes in a customizable way. The software also provides comprehensive model reports, including recipe information, element temperatures, oxidizer levels, pressure, RF power level and other process characteristics. LAM RESEARCH TCP 9600SE etcher / asher is designed for advanced semiconductor device etching, cleaning and passivation applications. Its advanced process control algorithms, integrated RF generator and digital software allow for precise and reliable wafer-level process control, making it an important industrial tool for the semiconductor industry.