Used LAM RESEARCH TCP 9600 SE #9095947 for sale

LAM RESEARCH TCP 9600 SE etcher/asher is a high-performance, automated process tool designed for semiconductor applications in etching and ashing. It is used to achieve superior results in metal etching, anisotropic silicate etching (ASE), advanced via formation, and dielectric ashing processes. LAM RESEARCH TCP 9600SE is equipped with an exclusive remote visual monitoring system, allowing users to monitor and assess process results from a remote location. Its advanced physical vapor deposition (PVD) source allows for better film uniformity and greater process control. TCP 9600 SE includes a hydrodynamic platen, enabling faster and more accurate results as well as increased process throughput. This is complemented by an integrated, three-zone separation system; a high pressure, low temperature, pressurized polymer tray; and a heated etch module that allows users to achieve higher etch rates. Additionally, TCP 9600SE incorporates a host of internal tools and features, such as a multifunctional valve block and integrated vacuum system, a wafer tracker, and an RF generator. All of these features make LAM RESEARCH TCP 9600 SE one of the most powerful and reliable etcher/asher systems on the market.