Used LAM RESEARCH TCP 9600 SE #9134002 for sale
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ID: 9134002
Wafer Size: 6"
Etcher, 6"
Operation system: Classic
Clamp type: E
APM Type: Standard
Stripper type: DSQ
General hardware information:
System requirements: 208V / 3PH / 50 / 60Hz
AC / DC Configuration: 001
Gas box type: Orbital type
Main chamber pressure regulation type:
WVDS Type: Auto
DSQ Type: Hinged
TMP Options:
TMP Type: A1 1300M
Endpoint detection options: 261 / 703
Endpoint window type: Non HTD
Monochromator hard structured: N
Lam standard remote AC box: No
CR Configuration:
Ballroom: Bulkhead
Mini environment: No
Factory automation configuration:
Open cassette: 6"
Miscellaneous configuration:
Remote user interface: Yes
XLL Wafer sensor: Yes
Vacuum / RGA Check port: Vacuum check port main chamber
Manuals: No
Pumping system options: No
Mainteinance tool kits: No.
LAM RESEARCH TCP 9600 SE is an etcher/asher designed for precise and repeatable cleaning of chamber walls and other surfaces that require precise, controllable cleaning. It utilizes a non-metallic spray equipment to create a precise, repeatably uniform cleaning process. The system is capable of precise coverage and precisely repeatable cleaning, with results that are consistently precise and reliable. LAM RESEARCH TCP 9600SE features patented technology which employs a pulsed spray nozzle that restricts the flow of liquid to an extremely fine particle size, producing a spray pattern that is much finer than any other unit on the market. This creates a pattern of coverage that is repeatable and precise and able to cover much higher areas of chamber walls with greater accuracy. The machine also features a unique spray coating mechanism that utilizes anodized vapors, allowing for consistent and precise cleaning of the surfaces that require it. TCP 9600 SE is equipped with a number of safety features, to ensure that the cleaning process is safe and efficient. These include abrasion-resistant materials, and a built-in screen to protect from runoff and contain any aerosols created during the process. The tool is also equipped with an automatic shut-off feature in the event of an unplanned stoppage in the flow of cleaning solution, preventing any potential contamination of the equipment or chamber walls. TCP 9600SE also features a range of advanced control features. This includes adjustable spray settings to ensure precise and repeatable coverage, as well as the ability to set up multiple cleaning cycles with different settings to suit different surfaces and cleaning requirements. The asset is also capable of performing automatic recalibration of the spray coating process, reducing the need for manual calibration and improving model performance. In conclusion, LAM RESEARCH TCP 9600 SE is an etcher/asher that is capable of precise, repeatable cleaning of chamber walls and other surfaces requiring precise and controllable cleaning. It features patented technology that creates exceptionally fine and repeatable coverage, as well as safety features and advanced controls for reliable and consistent results. With its combination of high performance and safety features, LAM RESEARCH TCP 9600SE is a great choice for those looking for precise and reliable cleaning processes.
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