Used LAM RESEARCH TCP 9600 SE #9153019 for sale
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ID: 9153019
Wafer Size: 8"
Vintage: 1996
Etcher, 8"
SMIF Indexer
Auto loader
Auto fill WVDS & hinged DQS
SEIKO SEIKI STP-H1000L Turbo molecular pump
1996 vintage.
LAM RESEARCH TCP 9600 SE etcher/asher is a high-performance, cost-effective, and reliable tool for etching/ashing of semiconductor materials. This machine is capable of etching/ashing within the planar and vertical etch areas by using either direct current (DC) or radio-frequency (RF) based sources. The process chamber of the etcher is constructed with stainless steel, providing a stable and safe environment for processing both sensitive and heavily patterned semiconductor wafers. The 9600 SE is equipped with a powerful programmable motor and fan control, allowing for precise and accurate control of process conditions during the etching/ashing process. The equipment uses an advanced gas/vacuum source to deliver an even and consistent etch/ash profile across the entire wafer surface. Different gas flows and pressures can be configured to meet a wide range of etching needs, allowing for a high degree of control. In addition, the etcher is equipped with different electrodes, allowing for different kinetic energies to be applied depending on the material being etched, enabling the machine to achieve a consistent high level of performance. The 9600 SE's precision ashing capabilities allow for extremely accurate ashing of high aspect-ratio features. The system's advanced process chamber is designed to minimize surface damage and optimize the etching/ashing process. In addition, the etcher features an advanced automated wafer transfer unit, allowing high-speed wafer handling with minimal waiting time. The 9600 SE's programming capabilities offer the user full control over the etch/ash process, with automated processes enabling high throughput without any compromise on quality. The machine is equipped with top-of-the-line safety features, incorporating various monitoring systems such as thermal imaging and air flow analysis, ensuring that the operator is aware of any potential issues before they become critical. In addition, the tool utilizes smart data collection and storage software, allowing users to easily monitor and control the process parameters. LAM RESEARCH TCP 9600SE etcher/asher is an extremely versatile, reliable and cost-effective etching/ashing solution, ideal for high-performance, high-throughput applications. With its sophisticated programming capabilities, advanced process capabilities and comprehensive safety features, the 9600 SE is an excellent choice for etch/ash applications.
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