Used LAM RESEARCH TCP 9600 SE #9153545 for sale

LAM RESEARCH TCP 9600 SE is a state of the art etcher/ asher. It is designed for use in the plasma etch and wet chemical etch/ ashing processes. This machine is well suited for advanced process applications such as critical films, hard mask residues, and special films. It features a modular, unified, gas-tight chamber, allowing it to perform RIE, ICP, and plasma etches, as well as wet chemical etches and ashing. This machine is equipped with a wide range of tools, including laminar-flow, high capacity vacuum pumps, a high-frequency RF generator, and a high-resolution etch-control system. These allow it to perform a variety of different etch processes with superior consistency, accuracy, and repeatability. Its pressure control also allows for high-precision process control. LAM RESEARCH TCP 9600SE also has a set of automated recipe options, allowing the user to quickly set up and run batch processing with no programming required. Additionally, it is equipped with a range of automatic monitoring and control systems, including a process end-point detector and automatic adjustments to process parameters. TCP 9600 SE also features industry-leading safety features. These include an operator interface that restricts access to certain areas of the machine, an automated shutdown in the event of critical functional temperature, gas pressure, or other process parameter, as well as an integrated dual-restart system. In addition, it comes with a robust maintenance program from the manufacturer, including regular preventive maintenance, extended warranties, and post-sale service and support. This allows the customer piece of mind that their investment will be well taken care of for years to come. TCP 9600SE is an excellent choice for any laboratory that is performing etch/ ashing processes. Its combination of technological excellence, smart operational features, and after-sale service and support make it an ideal choice for any facility.