Used LAM RESEARCH TCP 9600 SE #9169594 for sale

LAM RESEARCH TCP 9600 SE
ID: 9169594
Wafer Size: 8"
Vintage: 1993
Etcher, 8" APM Function RF Matcher 1993 vintage.
LAM RESEARCH TCP 9600 SE is an advanced etcher/asher equipment perfect for research and industrial applications. This system is globally conditioned and includes a nitrogen recycling cradle for optimal performance. LAM RESEARCH TCP 9600SE is a single-wafer etching and ashing unit with a process range of up to 12 gases and linear velocities from 0.25 nm/min to 1.0 nm/min. It offers full temperature control from -20°C to +20°C, which provides for the flexibility needed for research and development of new processes. TCP 9600 SE has a patented linear velocity profile (LVP) control, which offers superior process uniformity with minimal wafer warping. For ease of operation, TCP 9600SE has a user-friendly touchscreen interface with multiple language options. It offers graphical representations of recipes and critical parameters, making operation and verification of recipes quick and efficient. Furthermore, LAM RESEARCH TCP 9600 SE can be used to simulate multiple process parameters before beginning a run, thereby eliminating guesswork and reducing the time to completion. LAM RESEARCH TCP 9600SE etcher/asher also offers additional flexibility in the form of highly customized templates. This allows users to have a wide range of scripts available to help automate and simplify the operation of the machine. In terms of safety, TCP 9600 SE comes with active plasma locks that automatically shut off the plasma if the process parameters are exceeded or an anomaly is detected. This is crucial to keeping researchers safe from hazardous emissions. The tool is also equipped with an Emergency Shutdown (ESD) asset that can be used to shut down the machine in the event of an emergency. All in all, TCP 9600SE is an advanced etcher/asher model perfect for research and industrial applications. Its user-friendly interface and highly customizable templates make it easy to operate, while its advanced safety features offer users maximum protection.
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