Used LAM RESEARCH TCP 9600 SE #9197777 for sale

LAM RESEARCH TCP 9600 SE is a state-of-the-art etcher and asher that offers efficient, reliable etching and ashing performance. The equipment is designed with a highly repeatable, automated process that offers quick and accurate results along with easy to use controls. LAM RESEARCH TCP 9600SE is designed to meet high-volume throughput requirements in the most demanding production and research environments. The system features an automated cassette-to- cassette process and efficient load handling, allowing for quick and consistent production. TCP 9600 SE has a high-throughput capacity, allowing for up to 8 substrates per cassette with a maximum cassette capacity of 96 substrates. The unit's low cross contamination and low substrate deposition rate offers a highly repeatable and stable etching and ashing process. TCP 9600SE comes equipped with a self-contained process chamber, allowing for easy exchange and continuous cleaning. The process chamber is integrated with a one-step bake-out process, minimizing downtime and allowing for maximum uptime and throughput. The machine has an advanced diagnostics feature, allowing for real-time monitoring of the process. The precision of the tool is unmatched, offering repeatability and accuracy of within 3% at all steps of the etching and ashing process. The integrated process guards against unwanted etching, offering an extremely level profile with low substrate deposition. LAM RESEARCH TCP 9600 SE is capable of etching and ashing a wide variety of materials, including ArF, IBE, and deep-etching of wafers with varying resistivity. Overall, LAM RESEARCH TCP 9600SE offers outstanding etching and ashing performance in a highly efficient and controlled environment. With a customizable platform and stable process, TCP 9600 SE is designed to meet the highest productivity, throughput, and accuracy standards in any research or production environment.