Used LAM RESEARCH TCP 9600 SE #9197974 for sale

LAM RESEARCH TCP 9600 SE
ID: 9197974
Etcher, 8" Includes: Accessory Dry pump Remote power module.
LAM RESEARCH TCP 9600 SE is a high-performance, automated etcher / asher equipment developed to meet the fast-paced and challenging needs of today's semiconductor industry. It offers a fast turn-around time, high-precision etching results, and an advanced process control capability that is designed to meet all of the demands of modern production applications. LAM RESEARCH TCP 9600SE is designed for exceptional throughput and can handle a wide range of materials, including metal, metal oxide, silicon, and other dielectric films. Its controllable plasma source enables high-quality etching results in a there-dimensional, uniformity-controlled processing environment. Its dynamic airflow positioning controls the plasma from the source to the substrate, minimizing unnecessary consumption and achieving targeted etch rates. TCP 9600 SE is equipped with an innovative gas abatement system that uses advanced filters to minimize the presence of volatile organic compounds in the chamber environment. This unit is essential for ensuring a safe and compliant process environment. TCP 9600SE also employs extra safety measures, such as gas interlocks and external pressure sensors, to ensure the utmost protection of personnel. The machine's advanced process control capabilities ensure the highest level of reproducibility and yield throughout the production process. The integrated software suite provided with the tool enables real-time process monitoring and data collection, as well as post-process file analysis and reporting. In addition, the onboard wafer-mapping asset allows concurrent, automated impedance and image-based process parameters across multiple wafers for total process oversight. Finally, the industry-proven infrared process head allows for non-exhaustive wafer motion and longer wafer run times, which translates to an uncompromised level of quality, throughput, and yield. From providing the highest levels of precision and efficient process control to undergoing rigorous safety checks, LAM RESEARCH TCP 9600 SE provides unmatched capabilities and reliability in etcher / asher technology. It is the ideal model for those who need a reliable, scalable, and profitable solution for the ever-changing demands of the semiconductor industry.
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