Used LAM RESEARCH TCP 9600 SE #9211769 for sale

LAM RESEARCH TCP 9600 SE is an advanced Plasma-based Asher/Etcher Equipment designed for the deposition of polymers and other thin films for a variety of applications. LAM RESEARCH TCP 9600SE is capable of performing high-end etching, etch rate measurements, and thermal reflow of thin transferred films on wafers. The Core technology of the System is the "Reactive Ion Etching" (RIE), which combines the physical effects of ion bombardment with the chemical effects of gas-phase energy transfer to produce highly anisotropic etching profiles. In addition, the Unit includes an ULTRAWATER Module to provide high-purity de-ionized process water in a reliable, repeatable manner. TCP 9600 SE utilizes the latest technologies to make accurate etching of structures and materials possible. It is equipped with a high-precision process chamber with programmable scan vectors for superior process control. The Machine also features a high-speed Plasma Source for fast etching cycles, a low-vapor delivery tool for clean etching, and a specializ gas delivery asset which isolates etch gases from user and environment. In order to ensure safe and reliable operation, the Model includes several safety features such as automated pressure regulation, air/gas leakage detection, purge gas control, and fire and gas detection/suppression systems. TCP 9600SE is part of the next generation of LAM RESEARCH Asher/Etcher Equipment, offering superior performance and reliability. The System provides users with a range of advantages such as better process control, superior uniformity, and greater throughput. The Unit is ideal for wafer-level packaging applications and other advanced IC processing applications.