Used LAM RESEARCH TCP 9600 SE #9228025 for sale
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ID: 9228025
Wafer Size: 8"
Etchers, 8"
Control system: EnVision
CPU: 586 Processor
HINE 38A Indexers
Process chamber:
Ceramic TCP window
Endpoint detection, 853-001983-011
Heated endpoint window
Process kits, 6"
6" ESC Semi / Major / No minor
No chamber liner set
SEIKO SEIKI STP-1000 Turbo pump, 1000L/S
No turbo pump interlock board
Pendulum gate valve: VAT65
Vat gate valve controller: PM7
Main chamber manometer: 100mt
Turn RF coil: 6 Turns
DIP-PCB RF Tuner
Helium back side cooling
Gas
DSQ Chamber:
Hinged DSQ stripper
WVDS
Gas type and flow configuration: O2, CF4, H2O
Heated paddle, 6"
Quartz, 6"
Manometer: 10 Torr
Throttle valve pressure controller: MDVX
Auto fill WVDS temperature controller
Auto fill WVDS controller
Chemraz o-ring
APM:
Ambient and hot water: 70°C
Nitrogen gas blow dry
APM DI Water heater controller
APM DI Water nozzles
Others:
On-board 1250W generators: (3) RFG 1250
9600SE EnVision manual
No chiller
No dry pump.
LAM RESEARCH TCP 9600 SE is a next-generation etching/ashing tool designed for precision etching and ashing of semiconductor substrates. Its advanced process technology provides excellent performance and long-term reliability, enabling it to be used in production settings and research laboratories alike. LAM RESEARCH TCP 9600SE utilizes a double-sided quartz catalyst plate, or "etcher plate," which contains small ceramic pellets to create an even distribution of aqueous reactants and gases. The etcher plate is then exposed to a vacuum pressure environment and radio frequency (RF) power which energizes the reactants and rapidly drives them into the substrate. The tool is equipped with a highly customizable software and hardware platform allowing for precise control over the spatial uniformity and power settings. TCP 9600 SE has the following features: it is compatible with multiple substrate sizes and shapes, enabling users to etch and ashe on pieces ranging from 2 cm x 2 cm up to 12 cm x 12 cm. It also provides a wide range of pressures, temperatures, and reaction atmospheres to choose from. It also has several additional features such as a gas flow control system and water disposal, allowing for easy and safe operation. Overall, TCP 9600SE is a precision etching and ashing tool designed for semiconductor applications. Its advanced process technology and customizable software setup provides excellent performance while reducing operational costs and time. The versatile size options and automated environmental control ensure a safe and effective etching and ashing process. With its long-term reliability, LAM RESEARCH TCP 9600 SE is a perfect choice for any etching/ashing application.
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