Used LAM RESEARCH TCP 9600 SE #9228028 for sale

LAM RESEARCH TCP 9600 SE
ID: 9228028
Wafer Size: 8"
Etcher, 8" APM Function RF Matcher.
LAM RESEARCH TCP 9600 SE is a semiconductor-etching/ ashing equipment designed for optimal performance and convenience. It provides a fully automated etch/ash process for a wide range of dielectrics, metals and other materials. The system is pre-programmed with standard etch/ash recipes to provide consistency and flexibility in creating batches of unique features. LAM RESEARCH TCP 9600SE is equipped with advanced features such as a multi-head conveyor unit, a multi-channel control machine, and a high-speed wafer mapping tool. The multi-head conveyor asset utilizes both a roller conveyor and an acoustic transport subsystem. The roller conveyor is adjustable in size to accommodate wafers of various sizes. The acoustic transport subsystem is designed to transfer wafers in a non-contacting configuration without any mechanical contact. The roller drive supplies reduced-pressure air into a closed chamber, allowing the wafers to "float" within the chamber. The acoustic transport subsystem is powered by an ultrasonic oscillator, driving the wafers through an acoustic field generated by the vibrating tube. TCP 9600 SE is equipped with a multi-channel control model to control the process parameters and wafer mapping. The optically-mapped wafer mapping allows for precise positioning of the wafers on the supported platters. The multi-channel control equipment also allows for tracking of real-time etching and ashing progress, ensuring that the etch/ash chamber conditions remain optimal throughout the entire process. The high-speed wafer mapping system integrated into the unit is powered by a laser, which enables fast mapping of the wafers onto supported platters. The stored mapping data is used to monitor the status of etching and ashing processes. The mapping machine is capable of accurately defining the exact dimension of each wafer and its corresponding location on the supported platter with an accuracy of up to 5 microns. TCP 9600SE is a powerful etcher/asher offering precise control over the entire etching and ashing process. It enables high-speed mapping and precise etching/ashing of a wide range of materials. Its automated process and precision-control tool ensure consistent and reliable results. LAM RESEARCH TCP 9600 SE is an ideal asset for high-volume production of precise micro-electronic parts.
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