Used LAM RESEARCH TCP 9600 SE #9244726 for sale

'LAM RESEARCH TCP 9600 SE' is an etcher-style equipment designed specifically for semiconductor wafer etching applications. This system is designed to provide optimal process parameters and uniformity, ensuring consistent results. It provides the highest throughputs in production with the highest degree of accuracy, repeatability and process reliability for etching of today's advanced structured devices. LAM RESEARCH TCP 9600SE is a cassette-loaded, fully-featured unit which provides automated wafer loading, wafer mapping and wafer recognition with statistical process control machine. This gives the user complete control of the etching process, from recipe selection to actual processing. The pump is a rotary vane pump, providing the tool with a reliable and consistent operating pressure. The etcher uses a high-powered microwave generator to heat process gases, including chlorine compounds, to ionize the gas and electrically sputter the material to be etched off the wafer. The gas cleaning asset eliminates submicron particulates and impurities from the process effluent to protect the laboratory environment. The model has a cooling aperture that cools the wafer to the desired temperature to complete the etching process. TCP 9600 SE also includes advanced control systems. These include a quartz window temperature control equipment, an automated valve control system and a substrate temperature control unit. The quartz window temperature control machine ensures a consistent oxygen partial pressure in the process chamber, which promotes uniform etching rates. The automated valve control tool ensures a safe and consistent shutoff of process gases. The substrate temperature control asset prevents unstable flakes or chemical species from forming on the wafer. An advanced anti-overfill model also is included in the etcher. This equipment prevents overfill of the chemical reservoir, ensuring a safe and consistent etching process. TCP 9600SE is designed for compatibility with a variety of wafers, including silicon-on-insulator (SOI), single-layer and double-layer. This system is designed for use in cleanroom environments, including chemical-tolerant isolator hoods, and meets several safety standards including NFPA 495, NFPA 497, EC Directive 94/9/19 and ISO 9001/14001. LAM RESEARCH TCP 9600 SE etcher-style unit is an advanced etching machine that offers optimal etching process parameters, repeatability and reliability. This tool ensures a consistent and safe etching process, and is usable in a wide diversity of semiconductor materials and cleanroom settings.