Used LAM RESEARCH TCP 9600 SE #9300195 for sale

LAM RESEARCH TCP 9600 SE is an industrial-grade etcher and asher optimized for use in the semiconductor industry. It is designed to quickly etch complex structures into a variety of substrates with extremely high accuracy and repeatability. The standard version of the machine utilizes a new generation of process control software and hardware that provides better uniformity and productivity for different etching and ashing processes, including reactive-ion etching (RIE), electro-chemical etching (ECE), and plasma etching (PE). The machine also includes an inert gas delivery system, which ensures optimal uniformity and quality of the etch or ash process. LAM RESEARCH TCP 9600SE is constructed with the highest quality materials to provide reliable performance and extended life during harsh manufacturing processes. The Substrate Heater (SH) has a process chamber temperature range of 25 to 400 ºC, allowing for a variety of etch and ash processes. Additionally, TCP 9600 SE includes an X-Y-Z drive system with a maximum horizontal speed of 800 mm/sec and a vertical speed of 600 mm/sec, providing fast, accurate etching for all metals and non-metals. TCP 9600SE can be used for process chemistry such as full-field, direct-write etch, and planar integrated circuits (IC), such as those used in gigabit memory devices. Additionally, the machine has been optimized to provide superior performance in ion implanting and diamond push cutting, making it suitable for demanding types of electronic and photovoltaic device production. The etcher and asher allows for operation of a variety of gases, including O2, H2, He, and CH4, as well as high concentrations of Ar, HCl, SiCl4, and NH4HF2. LAM RESEARCH TCP 9600 SE is also fully integrated with process monitoring equipment for capturing real-time gas and vacuum measurements. The included operator HMI (human-machine interface) features multiple language support and has been designed for easy operation and troubleshooting. Dialog-driven menus provide users with all the information necessary to set up and control the machine. LAM RESEARCH TCP 9600SE is an advanced etcher and asher designed for industrial use, and capable of providing superior etch and ash results. With its robust, easy-to-use operation and advanced process control, it is an excellent choice for demanding etch and ash production processes.