Used LAM RESEARCH TCP 9600 SE #9300197 for sale

LAM RESEARCH TCP 9600 SE
ID: 9300197
Wafer Size: 6"
Metal etcher, 6".
LAM RESEARCH TCP 9600 SE is an advanced etcher/asher equipment designed for the fabrication of high-precision microelectronic components. This system is constructed from state-of-the-art components and powerful software that facilitate reliable, repeatable and accurate results. It is ideal for wafer etching applications that require high-precision and repeatability. LAM RESEARCH TCP 9600SE is highly modular, allowing it to be configured according to specific needs. All components of the unit are customizable, including plasma chamber size and type, plating options, vacuum systems, and heating elements. This allows it to accommodate a wide range of etch processes. The machine is based on a modular, multi-galvanometer optical design that enables higher throughput, accuracy and repeatability. The tool is also equipped with a variety of RF and DC power supplies, multiple source chambers, and other components that enable an optimized etch rate and uniformity. It also includes a unique plasma injection technology for maximum etching performance, as well as a wide range of process control options to help achieve reliable and consistent results. The asset also features a two-level safety interlock model, Pulsed Spectral Etching (PSE), a process control station, a software-based control equipment, and a high-speed data acquisition and analysis subsystem. These components enable TCP 9600 SE to precisely etch features down to 1/20th of a micron. Overall, TCP 9600SE is a versatile, advanced etcher/asher system that is designed to deliver reliable, accurate and repeatable results. Its modular design makes it highly customizable, and its advanced components enable it to achieve precision results and process control. Additionally, its safety interlock unit and other components help ensure safe operation at all times. This enables LAM RESEARCH TCP 9600 SE to be suitable for a wide range of etching applications, from research and development to large-scale production.
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