Used LAM RESEARCH TCP 9600 #148436 for sale

LAM RESEARCH TCP 9600 is an advanced etcher / asher equipment designed for advanced microfabrication processes. It offers precise control of temperature and process parameters, enabling the etching and ashing of delicate substrates while maintaining precise temperature and process parameters. LAM RESEARCH TCP9600 system is based on a gas cluster ion source, which is built into the unit and provides a precise, low voltage, and high current power source. In addition, the machine is designed with two removable wafer holders that are designed for both post-etch and post-ash applications in order to provide flexibility of the tool. The holders are designed for wafer sizes up to 200mm and accommodate process recipes of between 0.2 to 0.6kV. The asset also features a temperature and heat dissipation control capability which can limit the temperature of the substrate during etching or ashing operations. This feature is also important to minimize the possibility of sample damage due to high temperature. The model is equipped with an inert gas atmosphere that prevents contamination of the substrate by reacting substances in the atmosphere. It is programmable to provide controlled parameters based on user-specified recipes. TCP-9600 also features advanced programming features, allowing the user to specify etching parameters, select gases, enable/disable and select gas flow, enable/disable ultra high-frequency power, and enable/disable cluster and beam ion control. The user is even able to set individual etch and ash parameters. Finally, TCP 9600's equipment software provides an intuitive user interface for configuring and monitoring the etching and ashing operations. Overall, LAM RESEARCH TCP-9600 is a high quality etching / ashing system that provides precise temperature and process control. Its advanced features enable it to create high quality structures and patterns on a wide variety of substrates, making it an ideal solution for advanced microfabrication processes.