Used LAM RESEARCH TCP 9600 #293762298 for sale
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ID: 293762298
Wafer Size: 8"
Metal etcher, 8"
(3) RFG 1251 Generators
ADIXEN / ALCATEL 1300 Turbo pump
ADIXEN Turbo controller
VAT 65 Gate valve
VAT PM-7 Controller
ESC Clamping
Dual endpoints: 703 nm and 520 nm
Bulk head mounting
Hine indexer
Closed loop
RF Match: Upper TCP, lower mini match, DSQ Match
DSQ: Hinged
WVDS: Auto fill
STEC 7440 MFCs
APM: Standard
Gases:
Gases / SCCM
CL2 / 200
BCL3 / 100
SF6 / 100
N2 / 50
N2 / 1000
AR / 100
O2 / 1000
CF4 / 200
H2O / 500.
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