Used LAM RESEARCH TCP 9600 #293762298 for sale
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ID: 293762298
Wafer Size: 8"
Metal etcher, 8"
(3) RFG 1251 Generators
ADIXEN / ALCATEL 1300 Turbo pump
ADIXEN Turbo controller
VAT 65 Gate valve
VAT PM-7 Controller
ESC Clamping
Dual endpoints: 703 nm and 520 nm
Bulk head mounting
Hine indexer
Closed loop
RF Match: Upper TCP, lower mini match, DSQ Match
DSQ Hinged
WVDS Auto fill
STEC 7440 MFCs
APM: Standard
Gases:
Gases / SCCM
CL2 / 200
BCL3 / 100
SF6 / 100
N2 / 50
N2 / 1000
AR / 100
O2 / 1000
CF4 / 200
H2O / 500.
LAM TCP 9600 is an industrial etcher / asher designed for precision etching/ashing in high-throughput semiconductor fabrication. It utilizes an intuitive user interface to provide best-in-class control, accuracy and reproducibility. The equipment comes equipped with a state-of-the-art optical alignment system that ensures precise etching and ashing execution. The unit features a high-resolution, high-speed Digital Imager for capturing the highest-quality images possible. It also includes advanced optics and software to allow users to easily and accurately position their substrate for etching/ashing with no additional hardware or accessories. The machine is also equipped with LAM proprietary TCP 9600 controller. This controller contains a 32-bit ARM-Core internal processor, as well as a rich set of digital and analog signal inputs and outputs for interfacing with various devices, such as PID controllers, temperature sensors and motors. The tool includes a comprehensive suite of software applications that allow users to customize the asset settings, monitor activities and make changes in real-time. The controller is able to take full advantage of LAM advanced communication protocols, including TCP/IP, Ethernet, USB and RS232 protocols. This allows the model to be easily networked with other computers and devices. These communications protocols allow the equipment to be connected to a variety of control systems, giving users the flexibility to customize their usage situations and configure the system in a variety of ways. The unit is designed for fast and efficient etching/ashing of wide range of materials, including metals, alloys, polymers, semiconductors and magnetic materials. The machine is capable of supporting a wide range of temperatures, up to 110°C (230°F), for precise control of the etching process. The tool also features a number of safety features to protect users from potential hazards. In addition to its proven reliability, LAM TCP 9600 offers outstanding performance and precision. The asset provides accuracy down to 0.1 μm and an etch rate range from 0.00001 to 100 μ/min. The model also offers precise control of depth and angle, as well as excellent selectivity, enabling users to obtain outstanding etching results. TCP 9600 is truly a revolutionary, state-of-the-art industrial etcher/asher that provides reliable and precise etching and ashing capabilities. It is an ideal solution for high-throughput semiconductor fabrication and offers excellent control, accuracy and reproducibility for all types of applications.
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