Used LAM RESEARCH TCP 9600 #293824138 for sale

LAM RESEARCH TCP 9600 is an automated plasma etcher / asher designed for the precise and precise removal of soft materials from substrates. LAM RESEARCH TCP9600 includes advanced features to provide superior productivity and performance for etching applications, resulting in increased throughput and reduced cycle times. TCP-9600 etcher / asher utilizes a Dual Microwave Interface (DMI) to provide a more consistent and complete etch on all of the substrates. This technology provides nearly full coverage of the substrate with little to no variation in the etch rate. The dual microwave interface also allows for precise temperature control, allowing for consistent etch performance. TCP 9600 features an advanced etch tool featuring a large-area plasma etch chamber and a proprietary programmable gas distribution equipment. The gas distribution system allows for precise tuning of the etching environment across the chamber, giving users optimal control over the etching process. This result in a uniform etch process, with a low standard deviation in the etch rate. TCP9600 also employs plasma field shaping technology that helps to limit surface damage to the substrates, resulting in a cleaner, more uniform surface preparation process. The use of RF antennas allows for a wide array of plasma field shapes, allowing for more precise control over the etching. In addition, LAM RESEARCH TCP-9600 also includes a wide array of safety systems to ensure user safety and compliance. This includes an onboard coolant unit to minimize etch hazards, a humidity deck to provide extra protection from particulates, and an automatic pressure and temperature monitoring machine. LAM RESEARCH TCP 9600 is a fully automated etcher / asher that is designed to provide high-precision etching performance with increased throughput and shorter cycle times. It provides several features that enable users to safely and precisely process a large variety of substrates, resulting in uniform and clean surface preparation. This etcher / asher is suitable for a wide range of etching applications and is designed to meet the strictest standards of the semiconductor industry.