Used LAM RESEARCH TCP 9600 #293825708 for sale
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LAM RESEARCH TCP 9600 is an etch/ash equipment used for processing and patterning of semiconductor wafers. The system utilizes a remote-controlled electronic beam to precisely pattern and process the desired structures on a substrate surface. The beam is generated by a single-electron gun, which is mounted in a vacuum chamber inside the unit. The electron beam is focused and deflected by two electromagnetic coils; an electrostatic lens and an electrostatic deflection machine. The electron beam is scanned across the substrate surface to selectively etch, ash or deposit materials according to pre-defined pattern. LAM RESEARCH TCP9600 tool offers a wide range of features designed to meet the specific needs of semiconductor processing. These features include a large process bay with homogenous gas flow and acceleration asset, a broad selection of gas supplies, uniquely designed plasma source chambers and an advanced controller for precise alignment, scanning and control of the beam. Additionally, TCP-9600 model provides an easy-to-use user interface with an intuitive graphical display, allowing users to modify and optimize parameters such as scan speed and energy before each process step. The equipment also offers an array of diagnostic tools, including real-time imaging, which allow users to monitor each process step in real time. Finally, LAM RESEARCH TCP-9600 etch/ash system has a fast processing speed, allowing for higher throughput and improved device yield. The unit is also designed with a flexible architecture that can quickly be adapted to accommodate ever-changing semiconductor applications. This ensures that machine performance and reliability are maintained even with long-term, high-volume semiconductor etching and ashing.
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