Used LAM RESEARCH TCP 9600 #9043962 for sale

LAM RESEARCH TCP 9600 is an etcher / asher designed to perform volatile, precision etching and ashing processes with excellent uniformity and repeatability. The equipment utilizes the latest in advanced chamber technologies, process control and support systems to provide the utmost in reliable operation and superior-quality results for a wide variety of applications. The chamber size is small, allowing for high utilization of space, yet it is capable of process chamber volumes as large as 16 cubic inches. The system uses computer-controlled hardware, allowing for straightforward set up and monitoring of parameters. It is designed to minimize deformation and minimize transfer mark, which ensures that the best etch and ashing results possible can be achieved. The operator can use a built-in software program to set up parameters as well as create programs, and the unit can process presets as well as store up to 50 wafers for batch processing. Moreover, the machine features microprocessor-based PID control for greater precision and repeatability. With it, a user can generate and hold uniform gas flow across the chamber, which further helps to produce consistently excellent results. LAM RESEARCH TCP9600 also boasts a built-in pressure controller that allows for easy setting, monitoring and tracking of tool pressure, as well as a programmable temperature controller which can be used to monitor and set up optimal environment for the etching and ashing processes. The asset features a process-in-place capability as well, making it easier and cost effective to use only a single chamber for all processes, rather than multiple chambers. It also provides the user with greater flexibility in full wafer or process window utilization, as well as the ability to process multiple layers in the same chamber. Further, the model comes with an advanced safety package that helps ensure user safety, including fire proof door and chamber, warning timing, process override and arcing failure detection. TCP-9600 is a reliable and high-quality etcher / asher solution, offering precision and repeatability, easy automation, and excellent safety measures.