Used LAM RESEARCH TCP 9600 #9176483 for sale

LAM RESEARCH TCP 9600 is a medium-sized batch processing plasma etcher designed for precision material processing in the nanometer scale range. It is a 15-chamber system that offers digital image processing, multi-level process control, and material hardening for a range of materials including non-metallics. LAM RESEARCH TCP9600 can be used for a range of substrate surface treatments including desmearing, deposition, annealing, and etching. Materials accepted range from metals, semiconductors, and glass to polymers, ceramics, and specialty coatings. It is built with a 15 process chamber with options for nitrogen, argon,pCF4, and engraving gases that can be used in combinations. It also includes a robust material handling system, with automatic sample transport and a particle filtration system, making it ideal for high repeatability applications. The main user interface is a PC workstation, offering full process and materials control. All processes are labeled, allowing users to quickly and easily configure the machine for specific materials and applications. TCP-9600 offers a range of process options, including dielectric etching, descum, anneal, deposition, and photodefinition. It also offers custom tailored variations, with adjustable pulse times, dwells and processes for hardening. LAM RESEARCH TCP-9600 Etcher is a powerful choice for precise nanometer-scale material processing. It has been designed with environmental safety in mind, with all process chamber and transport branches optimized to preserve gas, power and safety while minimizing contamination risks. TCP9600 provides a simple and precise approach to material processing; allowing precise control over pulse times, dwells and other process variables to give the desired results. With its robust material handling, cleanroom-grade safety, and repeatable accuracy, TCP 9600 is a great option for precise nanometer-scale material processing.