Used LAM RESEARCH TCP 9600 #9226996 for sale

LAM RESEARCH TCP 9600 is an advanced etching / ashing equipment designed for precision etching and ashing of various materials. Featuring a robust design, LAM RESEARCH TCP9600 has an optimized platform with low power operation and a re-circulated gas path to maximize throughput and minimize maintenance costs. TCP-9600 offers an optimized high-pressure process environment with a chamber size of 13.2 x 13.2 inches which can process up to 6 wafers per cycle. It also has a tri-mode process chamber for optimal high-temperature, low-temperature or ambient temperature processes. The system ensures user-friendly operation with its easy-to-use user interface and over-temperature safety switches. The automated process unit comes with several dedicated components such as a high performance turbo pump, sample transfer machine and a flow controller/mixer. The high performance turbo pump provides high chamber evacuation speeds during the warm up, process and vent phases. The sample transfer tool enables the automatic positioning of wafers inside the etch/ash chamber. The flow controller/mixer accurately controls the combination of gases and ratios of the process gases at programmed intervals. TCP 9600 also has an external gas box which contains the valves, flow meters and a gas regulator, allowing for easy addition of process gases with specific parameters that are suitable for each application. A turbo molecular pumping asset ensures uninterrupted operation of high vacuum processes. LAM RESEARCH TCP-9600 also features an advanced software suite which includes high-end data acquisition, data analysis and process control. This sophisticated software allows the user to quickly and precisely monitor and adjust parameters such as temperature, pressure and flow rate for optimal etch/ash results. TCP9600 is an advanced etching and ashing model designed for precision etching and ashing of semiconductors, glasses and other materials. From its robust design, optimized platform, easy operation and advanced software suite, this equipment is the ultimate solution for obtaining precise etching/ashing results.