Used LAM RESEARCH TCP 9600 SE #9235586 for sale
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ID: 9235586
Wafer Size: 8"
Vintage: 2000
Etcher, 8"
Main process module (PM1): TCP 9600SE Metal etch
Pedestal type:
Wafer clamp: ESC With He cooling
Electrode gap: Fixed gap
Casette interface:
(2) Hine 38A indexers
Gas box configuration:
Orbitally welded gas box
Backside helium cooling: Unit MFC (50 sccm)
Gas line # / Gas / Flow (sccm) / MFC Mfgr / MFC Model
1 / N2 / 100 / Unit / 1600
2 / O2 / 100 / Unit / 1600
3 / N2 / 10 / Unit / 1600
4 / CL2 / 100 / Unit / 1660
5 / BCL3 / 100 / Unit / 1660
6 / SF6 / 100 / Unit / UFC-1200A
H2O 500 TYLAN VC-4900VRH
CE Marked
2000 vintage.
LAM RESEARCH TCP 9600 SE is a powerful etcher used in the semiconductor fabrication industry. It is a fully-featured platform that covers the entire etch process, from wafer loading to process control, product cleaning, and emissions monitoring. The equipment utilizes an LAMAX gas delivery system that operates over a pressure range of up to 60 millibar, allowing for precise control over the etch process. The machine is capable of etching substrates with a maximum wafer size of 200 mm, with a process time per wafer ranging from 3 to 30 minutes. LAM RESEARCH TCP 9600SE includes advanced software components that enable it to analyze the process parameters and enable high precision etching. These components include a light-based detector, a capacitance voltage sweeping unit, and a high throughput gas sensor. With this machine, users are able to tune the process parameters to achieve the desired etching result. Additionally, the tool is able to accurately monitor the gas flow rate in order to maintain the optimal etch environment. TCP 9600 SE also includes built-in diagnostics and tools that allow it to monitor its performance. The machine utilizes an advanced thermal control asset that maximizes throughput while minimizing waste and emissions. It also features a touch screen interface that provides access to all the model's functions. Additionally, the etcher is equipped with a precision quartz coating equipment that helps keep the chamber clean and prevents contamination of the chamber environment. TCP 9600SE is an effective and efficient etcher that provides users in the semiconductor fabrication industry with the ability to precisely tune their etch process. With a powerful software component, excellent build design, and advanced tools, the machine offers semiconductor manufacturers an effective way to achieve high-quality etching results.
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