Used LAM RESEARCH TCP 9608 SE #9226416 for sale

Name: LAM RESEARCH TCP 9608 SE
Brand: LAM RESEARCH
SKU: 9226416
Availability: InStock

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Photo Used LAM RESEARCH TCP 9608 SE For Sale

Etchers / Ashers

Manufacturer

LAM RESEARCH

Model

TCP 9608 SE

ID: 9226416

Vintage: 1998

Metal etchers Main CPU & ACDC module SMIF System: (2) ASYST 2200 Indexers Sub fab equipment: Remote AC box Handler system: Wafer notch alignment with spatula (2) Harmonic drive with wafer handlers APM Slider with shuttle arm Process chambers: Etching with E-chuck Stripping Spin rinse dry with vacuum chuck Main chamber: Turbo pump 1000 ltrs with controller E-Chuck TCP RF Match Bias RF Match (2) RF Generators CL2 MFC: 100 SCCM BCL3 MFC: 50 SCCM O2 MFC: 300 SCCM N2 MFC: 20 SCCM N2 MFC: 1000 SCCM Ar MFC: 100 SCCM He UPC: 50 SCCM Strip chamber: DSQ RF Match Heater paddle RF Generator Manual WVDS Controller O2 MFC: 2000 SCCM N2 MFC: 300 SCCM H2O MFC: 500 SCCM With controller (2) Load locks (3) RF Generators: 1250 W Manual WVDS Controller 1998 vintage.

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LAM RESEARCH TCP 9608 SE is an etcher/asher specifically designed to polish aluminum, brass, and other metals. The etcher/asher utilizes a controlled plasma source to etch metal surfaces at precise levels and temperatures. This system is a highly versatile machine, able to etch and asher simultaneously, in two separate chambers. The first chamber is designed to perform selective etching processes at temperatures up to 701°C and a wide variety of gases such as chlorine, oxygen, argon, and nitrogen. It is ideal for structuring processes such as thin film deposition, masking, and trench and pad definition. The second chamber is designed to perform ashing processes and is capable of temperatures up to 750°C. This allows for faster and more efficient ashing of organic material such as polymers, photoresists, perfluro polymers, and acrylics. TCP 9608 SE has several features to further enhance the efficiency of the etching and ashing process. It is equipped with an emission monitor and pressure sensor, ensuring process stability and repeatable operation. Additionally, the etch chamber has an adjustable flow rate and gas mixture mixing system for precise control of etching and ashing processes. The chamber also has integrated profiles for multiple recipes, making it easy to save and repeat commonly used processes. LAM RESEARCH TCP 9608 SE is designed for laboratories and industrial applications. It is designed for safe operation and offers a built-in safety shield for increased safety. It also complies with CE and UL standards, ensuring the longevity and quality of the machine. This system also has a feature to ensure process accuracy: a three-axis motion capability, which minimizes drift of the platten and results in precise process measurement. Overall, TCP 9608 SE is an etcher/asher that is designed to meet the needs of researchers, industrial engineers, and development professionals. It offers precise etching and ashing capabilities, as well as several safety features for user protection. Additionally, it is equipped with motion capabilities and advanced control systems for precision etching and ashing processes. If you are looking for a reliable and versatile etcher/asher, LAM RESEARCH TCP 9608 SE is an excellent choice.