Used LAM RESEARCH Torus 200 #9376881 for sale

LAM RESEARCH Torus 200 is an etcher/asher specifically designed to meet the needs of a wide range of application processes. It features an in-line three-dimensional (3D) imaging equipment, the downstream observation port, and an integrated conveyor system. This multi-functional etching and ashing unit is ideal for high-throughput substrate preparation and thin-film deposition in a single chamber. Torus 200 offers advanced processing versatility, which combines etching and ashing in the same chamber. It includes an intelligent gas control machine that supports up to four process gases, allowing for multiple substrate and film processes in a single cycle. The gas control tool optimizes the reaction parameters by automatically adjusting the etching and ashing conditions for each substrate. For precise substrate alignment and easy loading and unloading of the tool, an integrated substrate conveyor asset is provided. LAM RESEARCH Torus 200 utilizes an in-line 3D imaging model to detect any defects or impurities on the substrate during processing. The automated inspection equipment can detect any non-conformity between the programmed data and the actual substrate status - allowing real-time feedback for ultimate process accuracy and control. The downstream observation port also assists in monitoring and manipulating the etch and ashing process. The port offers superior observation capability and allows the user to observe the front, side and back surfaces of the substrate simultaneously. A unique automatic placement system (APS) is available to optimize the positioning of the sample on the substrate-collar, taking into consideration any irregularities on the surface. Torus 200 is equipped with advanced safety features that ensure the total safety of both personnel and equipment. To further improve the etch and ashing quality, advanced embedded software solutions are available that allow complete integration with other PrCB systems. The lightweight and robust design of the unit makes it suitable for multiple applications in both pilot and large-scale production. All in all, LAM RESEARCH Torus 200 is a reliable etcher/asher well suited to a range of applications. With its multiple process capabilities, advanced imaging machine, integrated conveyor tool and safety features, Torus 200 fulfils the varying needs of customers by offering high-quality and dependable solutions. Additionally, its light weight and robust construction make it ideal for continuous and automated operation in a variety of conditions.