Used LAM RESEARCH Torus 300B #9407116 for sale
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LAM RESEARCH Torus 300B is an advanced, high-precision etcher / asher equipment used in the semiconductor industry for wafer processing. The etcher is used for a variety of processes including etching and polishing. Torus 300B is a fully automated tool capable of delivering highly accurate and repeatable results in a wide range of etching and cleaning processes. LAM RESEARCH Torus 300B is powered by a gas control system integrated with a closed-loop reaction chamber for maximum control over the etch parameters. The reaction chamber can be quickly and easily changed, allowing to easily switch between different etch chemistries and substrates. The chamber can be up to 1.8L in capacity, and the unit is designed with low-temperature etch options. Torus 300B is designed with a highly efficient reaction chamber to minimize operating costs. Advanced process control algorithms and improved hardware have been integrated to deliver highly repeatable results with outstanding process performance. The etching process can be monitored in real time through the machine's user-friendly graphical interface, providing full control over etch parameters. The tool's integrated wafer handling module allows for quick and accurate wafer loading and unloading, streamlining wafer processing. The asset can be customized with a wide range of additional features, such as in-situ scrubbing and a specialized pump for precision cleaning. An advanced vacuum package can also be integrated to optimize process accuracy and reduce process times. LAM RESEARCH Torus 300B is designed to be user-friendly and reliable, offering increased process stability and repeatability. The model's impressive productivity and performance sets it apart from other etchers and ashers in the market today. It is the ideal choice for any semiconductor fabrication facility looking to process high-end wafers efficiently and reliably.
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