Used LAM RESEARCH Torus 300B #9407118 for sale

LAM RESEARCH Torus 300B is a single-wafer etcher and asher designed to quickly and accurately process high-precision wafers. This equipment is built with a high selectivity and reliability enabling it to accurately produce structures of various complex shapes and sizes. Torus 300B operates with a precise closed-loop feedback control which monitors both chamber pressures and gas flows for precise uniform etching. This allows for precise differentially-etched structures with pattern dimensions appropriate for a wide range of applications. These applications include advanced lithography, fine circuit and MEMS fabrication, 3D ICs (3 Dimensional Integrated Circuits), and high-density electronic devices. The series of two-stage pumps provides a robust, fast, and highly accurate etching process which increases throughput and yields. These pumps are rigidly mounted and vacuum sealed to reduce potential vibration, while the included high-accuracy positioning servo actuator eliminates manual handling and alignment. Furthermore, the system incorporates a patented integrated self-aligned plasma source featuring advanced process control to ensure high-performance operation. LAM RESEARCH Torus 300B also offers a wide range of advanced features such as a Flexible Match Mode (FMM) where the unit follows optimal process timing to provide consistent etching across wafers and a selectable cycle time reduction (CTR) feature which can reduce non-productive cycle time up to 70%. In addition, the machine includes a wide range of safety and protection mechanisms, including a patented Ultra Low Particle Etch (ULPE) process, to ensure operator protection from harmful exhaust gases. Overall, Torus 300B is a reliable and advanced etching tool which is capable of producing intricate patterns with precise selectivity and uniformity. The series of two-stage pumps provide high performance and accuracy, while the integrated self-aligned plasma source ensures a high-performance operation. Furthermore, the asset also provides safety and protection mechanisms to ensure operator safety.