Used LAM RESEARCH Torus 300B #9408569 for sale

LAM RESEARCH Torus 300B is an etcher/asher specifically designed for application in integrated circuitry manufacturing. It is a highly specialized etcher and asher that can be used for a variety of etching and ashing operations. Torus 300B features a twin-gas delivery equipment that gives users the flexibility to use either reactive gas mixtures or isotopes. Its large active area allows for high-density etching and ashing without compromising edge resolution. The chamber of LAM RESEARCH Torus 300B is designed for both time and energy locked deliveries, which helps ensure the best possible results. It has an adjustable pressure range of up to 5 mbar and an adjustable temperature range of -5 °C to +150 °C. This enables it to effectively etch nearly all materials with a variety of etching parameters. It can also be used to deposit metals and dielectrics, making it ideal for a broad range of manufacturing operations. Torus 300B utilizes a thermal evaporator which allows users to precisely deposit materials, including metals and dielectrics, with high accuracy. It also features a built-in etch monitor that enables users to track the progress of the etching process. With the included software, users can program a variety of etching parameters including substrate materials, number of cycle steps, photomask pattern, and process control parameters. LAM RESEARCH Torus 300B is enclosed in a vacuum chamber, which keeps the process environment stable, allowing users to achieve repeatable and reliable results. Additionally, it is designed for easy installation and minimal maintenance. Torus 300B utilizes an automated self-diagnostic system which allows users to quickly diagnose and address any unit issues. LAM RESEARCH Torus 300B is built with safety in mind. It features an emergency interlock machine to quickly shut down the tool and evacuate gas in the event of an emergency. In addition, it includes a built-in pressure and temperature monitoring asset. All of these features ensure that operators work in a safe and compliant environment. Overall, Torus 300B is an ideal etcher and asher for manufacturing high-quality integrated circuits. With its twin-gas delivery model and adjustable pressure and temperature range, it can handle a variety of etching and ashing applications with ease. Its adjustable cycle parameters and built-in safety features make it reliable and safe for use by operators.