Used LAM RESEARCH Torus 300S #9268953 for sale

LAM RESEARCH Torus 300S is an etching/aspiration equipment designed to provide high-accuracy etching and stainless steel ashing in high-volume manufacturing applications. Torus 300S is equipped with a range of features, including a high-accuracy floating chuck to ensure precise substrate placement; an integrated cascading RF generator for multi-frequency etching; a hands-free ashing process; and a web-enabled automated process control system. LAM RESEARCH Torus 300S is an ideal choice for etching of both small and large substrates, due to its flat-panel capability and high-accuracy floating chuck. Its RF generator enables a wide range of different etching processes, including multi-frequency etching, with a fully-adjustable voltage range. The floating chuck allows for precise substrate positioning, ensuring high-accuracy etching and ashing. Additionally, Torus 300S is equipped with a hands-free ashing process, which allows for efficient stainless steel ashing without the need for manual intervention. LAM RESEARCH Torus 300S also features a web-enabled automated process control unit, which allows for real-time monitoring of etching and ashing processes. This process control machine is also designed to provide process optimization through advanced logical recipes. Torus 300S includes a variety of monitoring features, such as a real-time feedback tool for job tracking and optimization, as well as an integrated optical quality control asset to ensure highest-quality etching processes. In addition, LAM RESEARCH Torus 300S is designed to meet the most demanding environmental and safety standards. Its interior is constructed with stainless steel and anodized aluminum, ensuring long-term durability. The model is also equipped with an integrated gas safety equipment, designed to detect and monitor all process gases. Torus 300S is designed to provide high-accuracy etching and ashing processes in high-volume manufacturing applications. Its range of features, such as its high-accuracy floating chuck, integrated RF generator, hands-free ashing process, and web-enabled automated process control system, make it an ideal choice for etchers and ashers who need high-precision results and maximum process control.