Used LAM RESEARCH Vector Express #9099741 for sale

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ID: 9099741
Wafer Size: 12"
Vintage: 2007
CVD System, 12" Front UI System controller: MC3E, 02-257935-00 Module Controller: MC3E, 02-253704-00 IOC: IOC No.0, 1, 2, 3 HDSIOC ATM Robot & controller: Brooks reliance 8 / Friction type / controller 129974 Trust controller: C-2027-D01 Main power box: 208VAC /3 Phase main 150A, full load 100A ULPA Filter Pod loader: 3 / Fix load 6M LL/FE Interface PCB: 03-283968-00 ATM Door valve: (2) VAT Chamber slit valve: (2) SMC L/L Manometer: 10 Torr 750B 11TCE2GK Vacuum switch LTM type: LTM II Preheat pedestal Pedestal lift type: Servo motor Vent / purge valve L/L On-board pump: Kawasaki 27-283364-00 NV60N-2 Module type: PSIN HF Generator: Apex 3013 LF Generator: PDX 2500 HF Auto matcher: 27-279938-00 / Navigator 10013-L80MFI 3155162-002 D RF Distribution type: Balance kit RPC Source: Large RPC / Astron hf-s / 27-282770-00 RPC Power supply: AX7645 Pedestal: Standard type Showerhead Endpoint detector: IREPD - MKS Gas box: 02-323496-00 / SRD 200107436 MFC: Brooks SLA7950S MFC A: N2O(L) 1500 MFC B: N2 20000 MFC C: Ar 10000 MFC 1: SiH4 1500 MFC 2: N2 10000 MFC 5: He 20000 MFC 6: NH3 20000 MFC 7: N2O(H) 25000 MFC 8: O2 30000 MFC 9: NF3 10000 Arm position detector: Local manufactured option Gauge monitoring kit: Local manufactured option Spindle type: Servo motor, 27-278697-00 Stn No.1 pin lift type: Servo motor 2007 vintage.
LAM RESEARCH Vector Express is a next generation etcher/asher designed to meet the needs of the most advanced applications in the semiconductor manufacturing industry. The equipment is equipped with four powerful etching and ashing systems, each capable of independently etching and ash a variety of materials. The etching and ashing systems are uniquely designed with high-power automated control systems to provide reliable and accurate results. This system allows the user to operate multiple etching and ashing systems simultaneously, working together to generate the highest quality etching and ashing results. The automated control unit provides a simple user interface with intuitive menus, allowing the user to control the etching and ashing processes with confidence. The machine is designed to operate a wide range of etching and ashing recipes, ensuring that the user can achieve the desired process steps. The tool also utilizes advanced control features, such as variable etching speeds, programmable temperature and pressure settings, and variable gas flows. The asset also incorporates diagnostic tools to monitor the etching and ashing process, allowing for better quality control. Vector Express utilizes enhanced safety features to ensure the consistency and accuracy of the etching and ashing process. It utilizes a unique chamber construction method that isolates the sensitive components from the harsh environment of the chamber, ensuring that the etching and ashing processes can be performed without causing any damage to the chamber. The model also includes a unique vapor-tight seal to prevent any of the dangerous chemicals used in the etching and ashing process from entering the work area. The equipment also includes a powerful diagnostic tool that provides real-time reports on the etching and ashing process, allowing the user to monitor and adjust the etching and ashing parameters accordingly. This diagnostic tool allows for fast troubleshooting and provides the user with feedback on the system's performance. This real-time feedback ensures that the user can optimize the unit for the highest quality etching and ashing results. LAM RESEARCH Vector Express also offers enhanced performance capabilities that reduce the cost of ownership of the machine. It requires little or no manual maintenance, and its self-calibrating features ensure consistent quality and reliability. Its modular design allows for the incorporation of additional etching and ashing systems, while also offering flexibility to scale the tool up or down depending on the user's needs. Vector Express is a high-performance, highly reliable tool that provides etching and ashing solutions to meet even the most demanding applications in the semiconductor industry. Its advanced features and flexibility ensure that it can remain an integral part of any semiconductor manufacturer's production line.
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