Used LAM RESEARCH Vector Express #9137283 for sale

LAM RESEARCH Vector Express is a high-performance etcher (also commonly referred to as an asher) designed for wafer level processing needs. It is used for a variety of advanced technology etching applications, such as through-silicon-via (TSV), semiconductor packaging, MEMS, and optical components. Vector Express uses light-induced electrochemical etching (LIEE) technology, a mild etching process that can be used on a variety of substrates without damage or removal of underlying films. LAM RESEARCH Vector Express equipment is capable of high-precision etching in controlled conditions, achieving extremely precise patterns down to 10 nm and the etch factors needed for high-yield device manufacturing. It allows different conditions, such as etching pulse parameters, light source intensity, and gas type to be set for each sample or chemical, thus allowing optimal etching performance for each substrate. The main process and oven use a vacuum chamber to reduce particle counts and contamination from the process. Vector Express is temperature controlled, with thermocouple-linked temperature control. This feature ensures temperature stability, which is critical for uniform etching processes and production of high-quality devices. The system also uses an automated cooling unit for time efficiency, eliminating the need to wait for the cooling cycle to finish, and allowing for non-stop processing. The machine also offers automated and user interface solutions, such as resistivity control, recipe control, and full process monitoring, to ensure precision and repeatability. Additionally, the tool offers integrated process diagnostics including optical emission spectra detection and analysis, as well as imaging capabilities such as scanning electron microscopy (SEM) and contact angle imaging (CAI). LAM RESEARCH Vector Express is designed to meet the exacting process needs of scientific research and industrial manufacturing. The asset is ISO 9001 and ISO 14001 certified, and meets the stringent safety and quality requirements set forth by industry standards.