Used LAM RESEARCH Vector Extreme #9375208 for sale

LAM RESEARCH Vector Extreme
ID: 9375208
CVD System.
LAM RESEARCH Vector Extreme is a highly-precise etcher/asher designed to give the perfomer high-throughput and high yield. It is a top-of-the-line model for production and research labs, featuring a productivity-driven engineering design and architecture. This etcher/asher has a customizable design that allows for maximum flexibility for different tasks, projects, and substrates. It can be configured to a maximum spray chamber size of 85x48 in. and temperature from 50-250C. It is able to achieve maximum speed of 24"/min. and is equipped with precise linear stepping motor and direct drive linear guide system for faster movements. The etcher/asher also has integrated gas, etch, cooling pathways, which enables precise, repeatable high-efficiency process results. The control parameters of Vector Extreme can be customized thanks to the intuitive and easy-to-use software that allows users to take full advantage of its advanced features. In addition, this etcher/asher has an automatic end-point detection feature which utilizes embedded quad channel diodes for a uniform thickness of the processed substrate. It has an advanced pin carry system and auto-head homing with high precision. With a stainless-steel chamber and standard dust/shower filters, LAM RESEARCH Vector Extreme offers a highly reliable, production-ready cleanroom compatible platform. With safety features such as an Automatic Process Interruption, empty load stall detect, and multiple outlet power, ensures the user's safety in case of a power interruption. Vector Extreme is designed to support high productivity and long term reliability for etching/ashing, and other applications, and is well suited for low cost per unit production. With a data log and a comprehensive alarm system, this etcher/asher is an ideal choice for modern research and production labs.
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