Used LAM RESEARCH Vector Frame #293667429 for sale
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LAM RESEARCH Vector Frame is an advanced etcher/asher for etching and developing a wide range of substrates. This machine features a high-throughput, reliable design that can accommodate a variety of substrates. It is equipped with the most advanced technologies in both etching and developing. Vector Frame employs a dual-beam Evaporation electron gun that enables high-speed etching of substrates without compromising resolution. The etching process is monitored by a multi-chamber motorized stage that allows precise beam steering for uniform processing across the entire wafer. Substrates are clamped into the frame using a four-post mechanical system which allows high-speed loading and unloading. LAM RESEARCH Vector Frame also features a RF module for soft baking of thin substrates and a load-lock system with a Helium leak, allowing wafer processing in an inert atmosphere. The wafer processing can also be linked to a helium scrubber to remove any contaminants from the system. Vector Frame has several advantages over traditional systems. It eliminates the need for a vacuum baking process, saving time and cost. Additionally, it can process substrates from 2" to 4" in diameter with an accuracy of 4 microns. The machine can process up to 20 wafers per hour and is extremely easy to operate. LAM RESEARCH Vector Frame is a powerful and reliable etcher/asher with a wide range of capabilities. It is ideal for high-precision etching and processing of a variety of substrates. The machine offers excellent accuracy and results with precision and repeatability. With its advanced features, Vector Frame is a great choice for a variety of etching and developing applications.
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