Used LAM RESEARCH Versys Kiyo #9223498 for sale

LAM RESEARCH Versys Kiyo is an etcher / asher that provides superior cutting accuracy. It is a high performance etcher / asher with excellent productivity and reliable durability and is commonly used in the semiconductor industry. Versys Kiyo utilizes a unique double-ended disk-type technology that can effectively etch and asher a wide variety of materials with precision and accuracy. LAM RESEARCH Versys Kiyo features a three-zone ion source in which an asymmetrical arc is formed between two electrodes to create a focused beam of ions. This focused beam allows for precise etching and ashing of small features. Versys Kiyo also includes a wide range of gases for etch and ashing, such as fluorocarbon, oxygen, chlorine, nitrogen, and SF6. The high-pressure gas source ensures that each gas reaches its optimum pressure prior to reaching the substrate, resulting in a uniform etching and ashing of material. LAM RESEARCH Versys Kiyo combines high accuracy, excellent productivity, and reliable durability. The etching and ashing process is extremely precise and the flow of gas is regulated to ensure consistent result, even within small features. Versys Kiyo supports batch or in-line process as well as multi-chamber operations for maximum production efficiency. The intuitive software and user-friendly operation make LAM RESEARCH Versys Kiyo simple and easy for operators to use. In addition, Versys Kiyo is equipped with advanced safety features such as over-temperature and over-current protection, automatic system shut-off, and a lockout key for added safety. LAM RESEARCH Versys Kiyo offers a high level of repeatability and uniformity to ensure consistent etching and ashing of material. Versys Kiyo is an excellent choice for etching and ashing in a wide range of dielectrics, polymers, and semiconductors.