Used LFE 302-4IR #77365 for sale

LFE 302-4IR
Manufacturer
LFE
Model
302-4IR
ID: 77365
Wafer Size: 4"
Plasma stripper, dual 4" quartz chamber, 300 watt.
LFE 302-4IR is a fully automatic etcher/asher developed by LFE Technologies that is designed for use in advanced metal etching/ashing applications. The advanced features of this device provide optimal etching/ashing performance and excellent throughput. 302-4IR utilizes a combination of a focused beam of Ionized Gas (IG) and a metal mask with very fine etching/ashing, allowing for thin and precise etching/ashing. The High Frequency (HF) Generator is designed to generate a high power output, allowing the IG to be accurately focused and the metal mask to be precisely etched or ashed. The high-power IG capability of LFE 302-4IR improves the etching/ashing processes by delivering consistent results and reducing the amount of material wasted during etching/ashing. The ultra-high resolution etching asher is able to etch/ash micro components such as membranes, lenses and ridges, offering increased precision and accuracy over other standard ashers. The device is equipped with a four chamber system that allows for easy loading and unloading of the device after etching/ashing. The etching/ashing chambers are also equipped with a nitrogen purge, allowing for the removal of any remaining contaminates that may be left after the etching/ashing process. The device is outfitted with an intuitive graphical user interface (GUI), and a keyboard, mouse and keycard reader come standard with the unit. The integrated Ethernet connection facilitates remote usage, allowing for timely and efficient on-site repairs if necessary. The user-friendly GUI also allows for easy control and communication of the asher for precise, precise etching. 302-4IR is designed to provide precise etching/ashing with optimum results and excellent throughput. The precise high-power IG and high frequency generator, four chamber system with contaminant purge capabilities and the user-friendly graphical user interface with integrated Ethernet connection, provide an all-around advanced etcher/asher.
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