Used LFE 501 #83003 for sale

LFE 501
Manufacturer
LFE
Model
501
ID: 83003
Plasma barrel etcher Quartz barrel: 10" diameter x 20" deep (3) Gas inputs ENI RF Generator Fomblin prepped direct drive vacuum pump included Fomblin oil not included.
LFE 501 is an ultra-precision etcher/asher able to perform the most accurate and detailed etching and ashing processes. It is the perfect machine for demanding applications in the fields of semiconductor, biology, and nanotechnology. 501 is constructed with a high-specification optical system capable of producing fine, intricate patterns on surfaces with a minimum of 20 µm resolution. With its super-smooth motion control it ensures maximum precision, even during long processes. The integrated gas chamber reduces process contamination while the built-in scrubber helps reduce air pollution. With the lateral velocity control system, LFE 501 maintains fast and precise movement at all times, enabling perfect results. The chamber design ensures a high throughput allowing the processing of thin materials such as thin-film membranes and MEMS. The etching and ashing processes can be combined in one unit for multi-step applications, such as patterning and ashing. 501 features a three-dimensional, vibratory feed mechanism that can be adjusted to accommodate different objects, making it capable of handling a variety of materials. Precise positioning and controlled movement are possible due to the high-precision linear motors. The processor unit features a high-speed microprocessor with embedded software specifically designed for LFE 501, allowing for user-defined etching and ashing protocols. The system also includes a touchscreen display, allowing for convenient interaction with the device. 501 is a powerful and versatile etcher/asher with an impressive performance. Its compact design and flexible programming makes it an excellent choice for applications requiring high accuracy and maximum speed. It can be used in a variety of industrial and research applications, making it a true multi-purpose tool.
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