Used LFE PFS-PDE-PDS 501 & 504 #83002 for sale

LFE PFS-PDE-PDS 501 & 504 is a type of etcher and asher designed by Lam Systems Ltd, a provider of superior high-temperature processing tools. This dry etcher is primarily used for the removal of various thin layers of material from a substrate and for the deposition of thin layers of material on the substrate. PFS-PDE-PDS 501 & 504 utilizes a multi-gas mixture of different gases, which are delivered to the work chamber through a number of inlets. A type of multi-gas injector is used to allow for precise control of the gas mixture. The internal venturi allows for the creation of proper gas flow patterns to ensure uniform etching and ashing. This equipment also has two independent motorized vacuum chambers, an upper chamber and a lower chamber, which are connected with a specialized valve. This valve allows for precise control of both the upper and the lower chambers. The upper chamber is mainly used for substrate deposition while the lower chamber is mainly used for substrate etching. The system is designed to provide high etching and deposition rates as well as precise control over the process. It is fully programmable with a computerized control unit. This machine allows for automatic control over the speed, pressure, and temperature of the device. It also provides alarm notification when the process becomes too slow or fast. LFE PFS-PDE-PDS 501 & 504 is a reliable, versatile etcher and asher that provides superior performance for the removal of thin layers of material from substrates and for the deposition of thin layers of material on substrates. It is suitable for a wide range of applications, including semiconductor wafer etching, MEMS device fabrication, and plasma etching of organic photovoltaics.