Used MARCH AP 1000 #9130033 for sale
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ID: 9130033
Vintage: 2006
Plasma cleaning system
ENI ACG-6B-07 Power supply, 1.6 kVA, 600 W, 13.56 MHz
EDWARDS iQDP Dry vacuum pump
(2) PORTER Mass flow controllers
Power requirements: 208-230 V, 3-Phase, 23 A, 50/60 Hz
2006 vintage.
MARCH AP 1000 is a bench-top batch etcher / asher, designed for use in laboratories, microelectronic and production fields. This etcher uses powerful ion-assisted deposits to achieve extremely uniform, clean surfaces on a variety of materials. It is capable of etching metals, ceramics, and semiconductors with process uniformity and repeatability. MARCH AP1000 can etch materials from 1 to 350 μm in a single layer at rates from 0.1 to 10 μm/min, depending on etching parameters. The etcher uses two separate power supplies for controlled and precise combinations of reactive ions and reactive gases. An ion source provides the required etch selectivity and results in low stress etch process, eliminating post-etch damage. The etcher also has a gas delivery system that allows precise gas control for precise etching and precise control over the etching process. AP-1000 is equipped with digital controls to provide superior process and product repeatability, end point recognition, ±5% precise gas pressure control, and a digital display showing etch rate and other etching parameters. The digital circuitry also allows the user to control and set etching temperatures up to 200°C, allowing precise control over temperature-controlled etching processes. This versatile etcher can etch single or multi-layer structures and etch in both lateral and vertical directions. With an etch area of up to 193mm x 193mm, it can be used to etch small parts and large panels alike. It also includes a vacuum system, which allows for a wide range of applications, as well as deep etching depths. AP 1000 is a versatile etcher/asher designed for a range of applications, from industrial laboratories and SMT (Surface Mount Technology) assemblies to high-tech production and assembly. Its precise and repeatable process, combined with easy-to-use digital controls, makes it an ideal choice for applications requiring precision etching.
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