Used MARCH AP 1000 #9267760 for sale

MARCH AP 1000
Manufacturer
MARCH
Model
AP 1000
ID: 9267760
Plasma cleaner.
MARCH AP 1000 is an etcher/asher designed for semiconductor bench processing. It is a reliable, low-cost solution for small scale projects, allowing a single user to quickly and accurately pattern and remove material with precision. MARCH AP1000 is a benchtop etcher/asher that utilizes an RF generator and a mechanical drive system to transfer the part to be etched onto the plasma or IIR clean chamber's mounted platen. A cathodic arc ion source, coupled with an integrated process monitor, provides an effective etching solution at speeds of up to 1000 MHz. The etching and ashing processes are controlled via an easy-to-use control panel, which allows quick setup and parameters changes. The integrated gas manifold setup allows for a variety of gases to be processed, such as SF6 and CF4, while the use of a 4-quadrant shutter system enables processing of up to five parts simultaneously. This allows the speed of the etching process to be further improved. AP-1000 includes many advanced features such as a sample pre-treatment adaptation option, cooling blowers, process monitoring, fault elimination, and easy maintenance. The unit includes a power monitor, providing accuracy during pressure and temperature control, as well as voltage monitoring. Additionally, the 500mm (20-inch) opening provides easy access to samples, allowing them to be processed with minimal interruption. Overall, MARCH AP-1000 is an ideal etcher/asher for a variety of semiconductor processes. It is a reliable, low-cost solution for small scale projects, allowing a single user to quickly and accurately pattern and remove material with precision. The system is easy to use, and its automated features make for fast, efficient production runs.
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